Pinhole diffraction holography for fabrication of high-resolution Fresnel Zone Plates

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Fabrication of Fresnel zone plates for hard X-rays

A method to fabricate gold structures with high aspect ratio is presented. Fresnel zone plates with an outermost zone width of 100 nm and structures of 1 lm height are fabricated. Preliminary focusing results at an X-ray energy of 8 keV are presented and ways to improve the zone plate parameters are discussed. 2007 Elsevier B.V. All rights reserved.

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ژورنال

عنوان ژورنال: Optics Express

سال: 2014

ISSN: 1094-4087

DOI: 10.1364/oe.22.001402